Ultrasonic linear motor using multilayer piezoelectric actuators

Japanese Journal of Applied Physics

Volumn 34, Issue 5S, 1995, Pages 2756-2759

  Funakubo, Tomoki ^a   Tsubata, Toshiharu ^a   Taniguchi, Yoshihisa ^a   Kumei, Kazuhiro ^a   Fujimura, Takanao ^a   Abe, Chikara ^a  

^a OLYMPUS CORPORATION   (Japan)

Author keywords

Multilayer piezoelectric actuator; Ultrasonic linear motor; Ultrasonic motor; Ultrasonic oscillator

Indexed keywords

ACTUATORS; OSCILLATIONS; OSCILLATORS (MECHANICAL); PIEZOELECTRIC DEVICES;

MULTILAYER PIEZOELECTRIC ACTUATOR; ULTRASONIC LINEAR MOTOR; ULTRASONIC MOTOR; ULTRASONIC OSCILLATOR;

LINEAR MOTORS;

EID: 0029304726     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.34.2756     Document Type: Article

References (8)

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