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Volumn 77, Issue 7, 1995, Pages 2928-2936

Plasma diagnostics in pulsed laser TiN layer deposition

(8) Hermann, J a Thomann, A L a Boulmer Leborgne, C a Dubreuil, B a De Giorgi, M L b Perrone, A b Luches, A b Mihailescu, I N c

a UNIVERSITÉ D'ORLÉANS (France)

b UNIVERSITY OF SALENTO (Italy)

c INSTITUTE OF ATOMIC PHYSICS (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DENSITY MEASUREMENT; EMISSION SPECTROSCOPY; EXCIMER LASERS; FLUORESCENCE; IONS; LASER PRODUCED PLASMAS; NITRIDES; NITROGEN; PULSED LASER APPLICATIONS; TEMPERATURE MEASUREMENT; TITANIUM; VAPORIZATION;

ELECTRON TEMPERATURE; KNUDSEN LAYER; LASER INDUCED FLUORESCENCE; PLASMA PROPAGATION; PULSED LASER DEPOSITION;

PLASMA DIAGNOSTICS;

EID: 0029293306 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.358708 Document Type: Article

Times cited : (119)

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