Epitaxial growth of cubic AlN films on (100) and (111) silicon by pulsed laser ablation

Applied Physics Letters

Volumn , Issue , 1995, Pages 2066-

  Lin, Wen Tai ^a   Meng, Ling Cheng ^a   Chen, Guo Ju ^a   Liu, Hok Shin ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ELECTRON DIFFRACTION; EPITAXIAL GROWTH; EXCIMER LASERS; INTERFACES (MATERIALS); LASER ABLATION; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING SILICON; SURFACE STRUCTURE; THERMAL EFFECTS; TWINNING;

ALUMINUM NITRIDE; LATTICE MISMATCHES; MICROTWINS; PULSED LASER ABLATION;

THIN FILMS;

EID: 0029292172     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.113904     Document Type: Article

References (29)