A novel method for the preparation of NH3 sensors based on ZnO-In thin films

Sensors and Actuators: B. Chemical

Volumn 25, Issue 1-3, 1995, Pages 588-590

  Sberveglieri, G ^a   Groppelli, S ^a   Nelli, P ^a   Tintinelli, A ^b   Giunta, G ^b  

^a UNIVERSITY OF BRESCIA   (Italy)

^b Eniricerche SpA   (Italy)

Author keywords

Ammonia sensors; Indium; Zinc oxide

Indexed keywords

ALUMINA; AMMONIA; CRYSTAL ORIENTATION; PHASE TRANSITIONS; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM; SEMICONDUCTING ZINC COMPOUNDS; THERMAL CYCLING; THIN FILM DEVICES; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

AMMONIA SENSORS; THERMAL EVAPORATION; ZINC OXIDE-INDIUM THIN FILMS;

CHEMICAL SENSORS;

EID: 0029288575     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-4005(95)85128-3     Document Type: Article

References (11)

1. Adsorption on oxides
2. Deposition of ZnO films by rf sputtering
3. Preparation of ZnO films by reactive evaporation
4. Growth of textured ZnO:In thin films by chemical spray deposition
5. Highly conductive and transparent ZnO:Al thin films prepared on high temperature substrates by d.c. magnetron sputtering
6. Dopant induced modifications in the physical properties of sprayed ZnO:In films
7. Oxygen gas-sensing characteristics for ZnO(Li) sputtered thin films
8. Homogeneous semiconducting gas sensors
9. Zinc oxide thin film ammonia gas sensors with high sensitivity and excellent selectivity
10. +-doped and undoped ZnO whiskers
11. 2 films containing trivalent additives