메뉴 건너뛰기




Volumn 34, Issue 10, 1995, Pages 1678-1683

Generalized matrix method for analysis of coherent and incoherent reflectance and transmittance of multilayer structures with rough surfaces, interfaces, and finite substrates

Author keywords

Multilayer thin films

Indexed keywords

MATHEMATICAL MODELS; MATRIX ALGEBRA; OPTICAL PROPERTIES; SEMICONDUCTOR MATERIALS; THIN FILMS;

EID: 0029288038     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.34.001678     Document Type: Article
Times cited : (163)

References (31)
  • 1
    • 84975541790 scopus 로고
    • Computational method for determining n and k for a thin film from the measured reflectance, transmittance, and film thickness
    • J. M. Bennett and M. J. Booty, "Computational method for determining n and k for a thin film from the measured reflectance, transmittance, and film thickness," Appl. Opt. 5, 41-43 (1966).
    • (1966) Appl. Opt , vol.5 , pp. 41-43
    • Bennett, J.M.1    Booty, M.J.2
  • 2
    • 84975551510 scopus 로고
    • Determination of optical constants from intensity measurements at normal incidence
    • P. O. Nilsson, "Determination of optical constants from intensity measurements at normal incidence," Appl. Opt. 7, 436-442 (1968).
    • (1968) Appl. Opt , vol.7 , pp. 436-442
    • Nilsson, P.O.1
  • 3
    • 0019635233 scopus 로고
    • Optical properties of phosphorus-doped polycrystalline silicon layers
    • G. Lubberts, B. C. Burkey, F. Moser, and E. A. Trabka, "Optical properties of phosphorus-doped polycrystalline silicon layers," J. Appl. Phys. 52, 6870-6878 (1981).
    • (1981) J. Appl. Phys , vol.52 , pp. 6870-6878
    • Lubberts, G.1    Burkey, B.C.2    Moser, F.3    Trabka, E.A.4
  • 4
    • 0021757316 scopus 로고
    • On the determination of the optical constants n(λ) and α(λ) of thin supported films
    • E. Elizalde and F. Rueda, "On the determination of the optical constants n(λ) and α(λ) of thin supported films," Thin Solid Films 122, 45-57 (1984).
    • (1984) Thin Solid Films , vol.122 , pp. 45-57
    • Elizalde, E.1    Rueda, F.2
  • 8
    • 0015313541 scopus 로고
    • Derivation of optical constants of metals from thin film measurements at oblique incidence
    • J. E. Nestell and R. W. Christy, "Derivation of optical constants of metals from thin film measurements at oblique incidence," Appl. Opt. 11, 643-651 (1972).
    • (1972) Appl. Opt , vol.11 , pp. 643-651
    • Nestell, J.E.1    Christy, R.W.2
  • 9
    • 0020830645 scopus 로고
    • Determination of optical constants of thin film coating materials based on inverse synthesis
    • J. A. Dobrowolski, F. C. Ho, and A. Waldorf, "Determination of optical constants of thin film coating materials based on inverse synthesis," Appl. Opt. 22, 3191-3200 (1983).
    • (1983) Appl. Opt , vol.22 , pp. 3191-3200
    • Dobrowolski, J.A.1    Ho, F.C.2    Waldorf, A.3
  • 10
    • 0001639319 scopus 로고
    • Determination of optical constants from reflectance or transmittance measurements on bulk crystals or thin films
    • H. W. Verleur, "Determination of optical constants from reflectance or transmittance measurements on bulk crystals or thin films," J. Opt. Soc. Am. 58, 1356-1364 (1968).
    • (1968) J. Opt. Soc. Am , vol.58 , pp. 1356-1364
    • Verleur, H.W.1
  • 11
    • 0017017243 scopus 로고
    • Asimple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film
    • J. C. Manifacier, J. Gasiot, and J. P. Filliard, "Asimple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin film," J. Phys. E 9, 1002-1004 (1976).
    • (1976) J. Phys. E , vol.9 , pp. 1002-1004
    • Manifacier, J.C.1    Gasiot, J.2    Filliard, J.P.3
  • 12
    • 0022812048 scopus 로고
    • A new method for the determination of the thickness, the optical constants, and the relaxation time of weakly absorbing semiconducting thin films
    • D. B. Kushev, N. N. Zheleva, Y. Demakopoulou, and D. Siapkas, "A new method for the determination of the thickness, the optical constants, and the relaxation time of weakly absorbing semiconducting thin films," Infrared Phys. 26, 385-393 (1986).
    • (1986) Infrared Phys , vol.26 , pp. 385-393
    • Kushev, D.B.1    Zheleva, N.N.2    Demakopoulou, Y.3    Siapkas, D.4
  • 13
    • 0003912962 scopus 로고
    • (North-Holland Amsterdam)
    • A. Vasicek, Optics of Thin Films (North-Holland Amsterdam, 1960), pp. 254-261.
    • (1960) Optics of Thin Films , pp. 254-261
    • Vasicek, A.1
  • 19
    • 84975599923 scopus 로고
    • Ph.D. dissertation (University of Thessaloníki, Thessaloníki, Greece)
    • 2 ternary compound thin films," Ph.D. dissertation (University of Thessaloníki, Thessaloníki, Greece, 1995).
    • (1995) 2 ternary compound thin films
    • Mitsas, C.L.1
  • 20
    • 0023564151 scopus 로고
    • Nondestructive determination of free carrier density of epitaxial layers of GaSb by IR reflectivity measurement
    • S. Schirar, L. Bayo, A. Melouah, J. Bougnot, C. Linares, A. Montaner, and M. Galtier, "Nondestructive determination of free carrier density of epitaxial layers of GaSb by IR reflectivity measurement," Thin Solid Films 155, 125-132 (1987).
    • (1987) Thin Solid Films , vol.155 , pp. 125-132
    • Schirar, S.1    Bayo, L.2    Melouah, A.3    Bougnot, J.4    Linares, C.5    Montaner, A.6    Galtier, M.7
  • 22
    • 0018529732 scopus 로고
    • Far infrared spatial probe of heteroepitaxial indium arsenide
    • P M. Amirtharaj and S. Perkowitz, "Far infrared spatial probe of heteroepitaxial indium arsenide," Thin Solid Films 62, 357-360 (1979).
    • (1979) Thin Solid Films , vol.62 , pp. 357-360
    • Amirtharaj, P.M.1    Perkowitz, S.2
  • 25
    • 84975648992 scopus 로고    scopus 로고
    • Oxide growth, refractive index and composition profiles ofstructures formed by 2-MeV oxygen implantation into Si
    • press
    • N. Hatzopoulos, D. I. Siapkas, and P. L. F. Hemment, "Oxide growth, refractive index and composition profiles ofstructures formed by 2-MeV oxygen implantation into Si," J. Appl. Phys., in press.
    • J. Appl. Phys
    • Hatzopoulos, N.1    Siapkas, D.I.2    Hemment, P.L.F.3
  • 26
    • 0022067283 scopus 로고
    • Comments on the determination of the absorption coefficient of thin semiconductor films
    • J. M. Pawlikowski, "Comments on the determination of the absorption coefficient of thin semiconductor films," Thin Solid Films 127, 29-38 (1985).
    • (1985) Thin Solid Films , vol.127 , pp. 29-38
    • Pawlikowski, J.M.1
  • 27
    • 84983895843 scopus 로고
    • The effects of sample imperfections on optical spectra
    • I. Filinski, "The effects of sample imperfections on optical spectra," Phys. Status Solidi B 49, 577-588 (1972).
    • (1972) Phys. Status Solidi B , vol.49 , pp. 577-588
    • Filinski, I.1
  • 28
    • 0017548106 scopus 로고
    • Optical absorption in d.c. sputtered InAs films
    • J. Szczyrbowski and A. Czapla, "Optical absorption in d.c. sputtered InAs films," Thin Solid Films 47, 127-137 (1977).
    • (1977) Thin Solid Films , vol.47 , pp. 127-137
    • Szczyrbowski, J.1    Czapla, A.2
  • 29
    • 0018012160 scopus 로고
    • Optical interference method for the approximate determination of refractive index and thickness of a transparent layer
    • A. M. Goodman, "Optical interference method for the approximate determination of refractive index and thickness of a transparent layer," Appl. Opt. 17, 2779-2787 (1978).
    • (1978) Appl. Opt , vol.17 , pp. 2779-2787
    • Goodman, A.M.1
  • 30
    • 0005796420 scopus 로고
    • Optical constants of tin-telluride determined from infrared interference spectra
    • D. Siapkas, D. B. Kushev, N. N. Zheleva, J. Siapkas, and I. Lelidis, "Optical constants of tin-telluride determined from infrared interference spectra," Infrared Phys. 31, 425-433 (1991).
    • (1991) Infrared Phys , vol.31 , pp. 425-433
    • Siapkas, D.1    Kushev, D.B.2    Zheleva, N.N.3    Siapkas, J.4    Lelidis, I.5
  • 31
    • 0001934387 scopus 로고
    • G. Hass, ed. (Academic, New York)
    • P. H. Berning, in Physics of Thin Films, Vol. 1, G. Hass, ed. (Academic, New York, 1963), pp. 69-71.
    • (1963) Physics of Thin Films , vol.1 , pp. 69-71
    • Berning, P.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.