Field emission and atom probe field ion microscope studies of palladium-silicide-coated silicon emitters

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 13, Issue 2, 1995, Pages 603-606

  King, R A ^a   Mackenzie, R A D ^a   Smith, G D W ^a   Cade, N A ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL ANALYSIS; ELECTRON EMISSION; EVAPORATION; LASER PULSES; MONOLAYERS; NEODYMIUM LASERS; SEMICONDUCTING SILICON; STOICHIOMETRY;

FIELD EMITTERS; FOWLER-NORDHEIM PLOTS; PALLADIUM SILICIDE; SILICON TIPS; THERMAL EVAPORATION; WORK FUNCTION;

PALLADIUM COMPOUNDS;

EID: 0029277276     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.587923     Document Type: Article

References (7)