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Volumn 47, Issue 1-3, 1995, Pages 549-556

A valve-less planar fluid pump with two pump chambers

Author keywords

Planar fluid pump; Pumps

Indexed keywords

CHEMICAL SENSORS; DIFFUSERS (FLUID); NATURAL FREQUENCIES; NOZZLES; OSCILLATIONS; PRESSURE; TWO PHASE FLOW; VIBRATIONS (MECHANICAL);

EID: 0029275289     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(94)00960-P     Document Type: Article
Times cited : (275)

References (16)
  • 6
    • 85024646407 scopus 로고    scopus 로고
    • R. Zengerle, A. Richter and H. Sandmaier, A micro membrane pump with electrostatic actuation, Micro Electro Mechanical Systems '92 (MEMS), Travemünde, Germany, 1992, pp. 19–24
  • 7
    • 85024635700 scopus 로고    scopus 로고
    • R. Rapp, P. Bley, W. Menz and W.K. Schomburg, Micropump fabricated with the LIGA process, Micro Electro Mechanical Systems '93 (MEMS), Fort Lauderdale, FL, USA, 1993. p. 123
  • 8
    • 85024652264 scopus 로고    scopus 로고
    • T.S.J. Lammerink, M. Elwenspoek and J.H.J. Fluitman, Integrated micro-liquid dosing system, Micro Electro Mechanical Systems '93 (MEMS), Fort Lauderdale, FL, USA, 1993, pp. 254–259
  • 9
    • 85024667284 scopus 로고    scopus 로고
    • V. Gass, B.H. van der Shoot, S. Jeanneret and N.F. de Rooij, Integrated flow-regulated silicon micropump, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, 7–10 June, 1993, pp. 1048–1051
  • 10
    • 85024651709 scopus 로고    scopus 로고
    • B. Büstgens, W. Bacher, W. Menz and W.K. Schomburg, Micropump fabricated manufactured thermoplastic molding, Micro Electro Mechanical Systems '94 (MEMS), Oiso, Japan, 1994, pp. 18–21
  • 11
    • 85024643763 scopus 로고    scopus 로고
    • E. Stemme and G. Stemme, Nozzle/diffuser pump, Swedish Patent Applic. No. 9 300 604-7 (1993)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.