Stochastic Electron Heating in a Capacitive RF Discharge with Non-Maxwellian and Time-Varying Distributions

IEEE Transactions on Plasma Science

Volumn 23, Issue 1, 1995, Pages 89-96

  Wood, Blake P ^a   Lieberman, Michael A ^b   Lichtenberg, Allan J ^b  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRON ENERGY LEVELS; ELECTRONS; MATHEMATICAL MODELS; PLASMA SHEATHS; TEMPERATURE DISTRIBUTION; THERMAL EFFECTS; TIME VARYING SYSTEMS;

CAPACITIVE RADIO FREQUENCY DISCHARGES; ELECTRON DISTRIBUTION; HEATING RATES; NON-MAXWELLIAN; PARTICLE BALANCE; SHEATH MOTION; STOCHASTIC ELECTRON HEATING; TIME VARYING TEMPERATURE;

PLASMA HEATING;

EID: 0029253870     PISSN: 00933813     EISSN: 19399375     Source Type: Journal    
DOI: 10.1109/27.376565     Document Type: Article

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