Surface micromachining: From vision to reality to vision

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn 38, Issue , 1995, Pages

  Payne, Richard S ^a   Sherman, Steven ^a   Lewis, Stephen ^a   Howe, Roger T ^a  

^a ANALOG DEVICES INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; AUTOMOBILE AIR BAGS; BIPOLAR INTEGRATED CIRCUITS; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; MOS DEVICES; SENSORS; SIGNAL TO NOISE RATIO; SURFACES;

AIRBAG DEPLOYMENT; CONTROL CIRCUIT ARCHITECTURE; POLYSILICON; SURFACE MICROMACHINING;

MICROMACHINING;

EID: 0029253824     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)