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Volumn 147, Issue 2, 1995, Pages K91-K94
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The Generation of Donor Centres Using Double Frequency of YAG:Nd Laser
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
ATOMS;
BORON;
CRYSTAL LATTICES;
CRYSTALLINE MATERIALS;
IMPURITIES;
LASER APPLICATIONS;
NEODYMIUM LASERS;
OXYGEN;
SEMICONDUCTING SILICON;
SURFACE PROPERTIES;
TEMPERATURE;
DONOR CENTRES;
DOPAND IMPURITY;
LASER ANNEALING;
ROOM TEMPERATURE;
SURFACE RESISTANCE;
SEMICONDUCTOR DOPING;
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EID: 0029253202
PISSN: 00318965
EISSN: 1521396X
Source Type: Journal
DOI: 10.1002/pssa.2211470242 Document Type: Article |
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Times cited : (31)
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References (5)
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