Production of a Quasi- Traveling Wave in a Silicon Rectangular Plate Using Single Phase Drive

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 42, Issue 1, 1995, Pages 59-65

  Manceau, J F ^a   Bastien, F ^a  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FREQUENCIES; GEOMETRY; MATHEMATICAL MODELS; PHASE SHIFT; PIEZOELECTRIC MATERIALS; PLATE METAL; RESONANCE; SILICON; VIBRATIONS (MECHANICAL);

MODE SUPERPOSITION; QUASI TRAVELING WAVE; RESONANT FREQUENCY; SINGLE PHASE DRIVE; STANDING WAVES;

ULTRASONIC WAVES;

EID: 0029232969     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.368312     Document Type: Article

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