On-wafer calibration techniques for measurement of microwave circuits and devices on thin substrates

IEEE MTT-S International Microwave Symposium Digest

Volumn 3, Issue , 1995, Pages 1045-1048

  Pla, Jaime ^a   Struble, Wayne ^a   Colomb, Francois ^a  

^a RAYTHEON COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; MICROWAVE CIRCUITS; MICROWAVE DEVICES; POLYIMIDES; PROBES; SEMICONDUCTING GALLIUM ARSENIDE; SILICON WAFERS; STANDARDS; SUBSTRATES;

MICROSTRIP CALIBRATION; ON WAFER CALIBRATION TECHNIQUES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0029231991     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)