High-frequency on-wafer testing with freely positionable silicon-on-sapphire photoconductive probes

IEEE MTT-S International Microwave Symposium Digest

Volumn 3, Issue , 1995, Pages 1053-1056

  Pfeifer, T ^a   Heiliger, H M ^a   von Kamienski, E Stein ^a   Roskos, H G ^a   Kurz, H ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DETECTORS; FREQUENCIES; INTEGRATED CIRCUITS; PHOTOCONDUCTING DEVICES; PROBES; SILICON ON SAPPHIRE TECHNOLOGY; SILICON WAFERS; SUBSTRATES; TRANSIENTS;

ON WAFER TESTING; PHOTOCONDUCTIVE PROBES; PICOSECOND ELECTRIC TRANSIENTS;

INTEGRATED CIRCUIT TESTING;

EID: 0029231305     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)