Influence of PCl3 on planarization and selectivity of InP regrowth by atmospheric pressure MOVPE

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1995, Pages 329-332

  Harlow, M J ^a   Spurdens, P C ^a   Moss, R H ^a  

^a MARTLESHAM HEATH   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; DIELECTRIC DEVICES; MASKS; METALLORGANIC VAPOR PHASE EPITAXY; PHOSPHORUS COMPOUNDS; POLYCRYSTALLINE MATERIALS; PRESSURE EFFECTS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR GROWTH;

ATMOSPHERIC PRESSURE METALORGANIC VAPOR PHASE EPITAXY; INDIUM PHOSPHIDE REGROWTH; PHOSPHORUS TRICHLORIDE;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0029228899     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)