Structural and electrical characterization of undoped poly-Si oxides

Materials Research Society Symposium - Proceedings

Volumn 358, Issue , 1995, Pages 933-938

  Sakamoto, T ^a   Tokioka, H ^a   Takanabe, S ^a   Kubota, T ^a   Niwano, Y ^a   Goto, Y ^a   Namizaki, H ^a   Wada, O ^a   Kurokawa, H ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY; ELECTRIC CURRENT MEASUREMENT; ELECTRIC PROPERTIES; HIGH TEMPERATURE APPLICATIONS; OXIDATION; OXIDES; POLYCRYSTALLINE MATERIALS; STRUCTURE (COMPOSITION);

ELECTRICAL CHARACTERIZATION; ELECTRON INJECTION; HIGH TEMPERATURE CRYSTALLIZATION; POLY SILICON FILMS; POLY SILICON OXIDES; POSITIVE GATE BIAS; PROTUBERANCES; SOLID PHASE CRYSTALLIZATION; STRUCTURAL CHARACTERIZATION;

THIN FILMS;

EID: 0029225591     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)