CMOS-compatible surface-micromachined pressure sensor for aqueous ultrasonic application

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2448, Issue , 1995, Pages 258-265

  Eaton, William P ^a   Smith, James H ^a  

^a UNIVERSITY OF NEW MEXICO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; DIAPHRAGMS; ELECTROMECHANICAL DEVICES; MICROMACHINING; SEMICONDUCTING SILICON; SILICON NITRIDE; STRESSES; SURFACES; ULTRASONIC APPLICATIONS;

MICROELECTROMECHANICAL SYSTEMS; MICROSENSORS;

PRESSURE MEASUREMENT;

EID: 0029225104     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)