High-temperature accurate thermal sensing using integrated platinum resistors on silicon

Conference Record - IEEE Instrumentation and Measurement Technology Conference

Volumn , Issue , 1995, Pages 538-540

  Foerster, J A ^a   Wolffenbuttel, R F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CHEMICAL VAPOR DEPOSITION; FABRICATION; HIGH TEMPERATURE OPERATIONS; MICROMACHINING; PLATINUM; SEMICONDUCTING SILICON; SILICON WAFERS; TEMPERATURE MEASUREMENT;

INTEGRATED PLATINUM RESISTORS; SILICIDATION; SILICON MEMBRANE; THERMAL SENSING;

RESISTORS;

EID: 0029223141     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)