Capillary instabilities in cobalt silicide thin films

Materials Research Society Symposium - Proceedings

Volumn 355, Issue , 1995, Pages 593-599

  Pramanick, Shekhar ^a   Patnaik, Bijoy ^a   Rozgonyi, George A ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; ANNEALING; COBALT ALLOYS; DIFFUSION; GRAIN BOUNDARIES; MATHEMATICAL MODELS; POLYCRYSTALLINE MATERIALS; SINGLE CRYSTALS; STABILITY; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY;

CAPILLARY INSTABILITY; COBALT SILICIDE; GEOMETRICAL AGGLOMERATION; GROOVES; RAPID THERMAL ANNEALING;

THIN FILMS;

EID: 0029222145     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)