Charging and discharging of stress-generated traps inside thin silicon oxide

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1995, Pages 233-238

  Scott, R S ^a   Dumin, D J ^a  

^a CLEMSON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; ELECTRIC CHARGE; ELECTRIC CURRENT MEASUREMENT; ELECTRONS; INTERFACES (MATERIALS); LEAKAGE CURRENTS; OXIDES;

HIGH VOLTAGE STRESS; SILICON OXIDE; TRAPS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0029217884     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)