Nanoindentation of epitaxial films: a study of pop-in events

Materials Research Society Symposium - Proceedings

Volumn 356, Issue , 1995, Pages 271-276

  Mann, A B ^a   Pethica, J B ^a   Nix, W D ^a   Tomiya, S ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; FILMS; MICROCRACKS; MOLECULAR BEAM EPITAXY; SEMICONDUCTOR GROWTH; SUBSTRATES; SURFACE TREATMENT; TRIBOLOGY; WEAR OF MATERIALS;

EPITAXIAL FILMS; EPITAXIAL LAYERS; MATERIAL DEFECT DENSITY; NANOINDENTATION; SURFACE PREPARATION;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0029217168     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)