Elastic properties of thin films

Materials Research Society Symposium - Proceedings

Volumn 356, Issue , 1995, Pages 567-572

  White Jr , B E ^a   Pohl, R O ^a  

^a Department of Molecular Biology and Genetics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; DEPOSITION; ELASTICITY; INTERNAL FRICTION; LOW TEMPERATURE PROPERTIES; MECHANICAL PROPERTIES; OSCILLATORS (ELECTRONIC); SILICA; SILICON WAFERS; THERMAL CYCLING; THERMODYNAMIC PROPERTIES;

DOUBLE PADDLE OSCILLATOR; ELASTIC PROPERTIES; LOW TEMPERATURE INTERNAL FRICTION; TUNNELING DEFECTS;

THIN FILMS;

EID: 0029216795     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)