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Volumn 363, Issue , 1995, Pages 45-50
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Ellipsometric investigation of metal-organic chemical vapor deposition of niobium oxide films
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
DECOMPOSITION;
DIELECTRIC PROPERTIES;
ELLIPSOMETRY;
ENERGY GAP;
NIOBIUM COMPOUNDS;
NONDESTRUCTIVE EXAMINATION;
REFRACTIVE INDEX;
BAND GAP;
CAUCHY TYPE DISPERSION;
INTERDIFFUSION BARRIER LAYERS;
NIOBIUM OXIDE FILMS;
THERMAL DECOMPOSITION;
VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
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EID: 0029216016
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (5)
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References (9)
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