Impact of a Ti adhesion layer on Pt/PZT/Pt capacitors

Materials Research Society Symposium - Proceedings

Volumn 361, Issue , 1995, Pages 223-228

  Jones Jr , R E ^a   Maniar, P D ^a   Dupuie, J L ^a   Kim, J ^a   Moazzami, R ^a   Witowski, J ^a   Kottke, M L ^a   Saha, N C ^a   Gregory, R B ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANNEALING; CAPACITORS; CRYSTALLIZATION; DIFFUSION IN SOLIDS; ELECTRODES; LEAD COMPOUNDS; PLATINUM; POLARIZATION; SOL-GELS; THERMAL EFFECTS; TITANIUM OXIDES;

ADHESION LAYER; PLATINUM/LEAD ZIRCONATE TITANATE/PLATINUM CAPACITORS;

FERROELECTRIC DEVICES;

EID: 0029214966     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)