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Volumn 3, Issue 1, 1995, Pages 93-105
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The numerical modelling of dislocation generation in semiconductor crystals during Czochralski growth
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Author keywords
[No Author keywords available]
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Indexed keywords
CONSTITUTIVE EQUATION;
CRYSTAL RADIUS;
DISLOCATION DENSITY;
DISLOCATION GENERATION;
COMPUTER SIMULATION;
CRYSTAL GROWTH FROM MELT;
FINITE ELEMENT METHOD;
HEAT TRANSFER;
PLASTIC DEFORMATION;
SHEAR STRESS;
TEMPERATURE DISTRIBUTION;
THERMAL EFFECTS;
THERMAL STRESS;
THERMOELASTICITY;
DISLOCATIONS (CRYSTALS);
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EID: 0029209248
PISSN: 09650393
EISSN: None
Source Type: Journal
DOI: 10.1088/0965-0393/3/1/008 Document Type: Article |
Times cited : (10)
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References (17)
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