High aspect ratio microstructures on porous anodic aluminum oxide

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 267-272

  Tan, Songsheng ^a   Reed, Michael ^a   Han, Hongtao ^a   Boudreau, Robert ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ANODES; ANODIC OXIDATION; ASPECT RATIO; CATHODES; ELECTROLYTES; LITHOGRAPHY; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SURFACES;

DEIONIZED WATER; ETCHANT RESISTANT MASKS; HIGH ASPECT RATIO MICROSTRUCTURES; POROUS ANODIC ALUMINUM OXIDE; ULTRASONIC BATH;

METALLOGRAPHIC MICROSTRUCTURE;

EID: 0029193653     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)