Evaluation of amorphous diamond-like carbon and boron nitride films as low permittivity dielectrics

Materials Research Society Symposium - Proceedings

Volumn 381, Issue , 1995, Pages 273-278

  Sullivan, J P ^a   Friedmann, T A ^a   Apblett, C A ^a   Siegal, M P ^a   Missert, N ^a   Lovejoy, M L ^a   Mirkarimi, P B ^a   McCarty, K F ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBON; COMPRESSIVE STRENGTH; CUBIC BORON NITRIDE; DEPOSITION; ELECTRON CYCLOTRON RESONANCE; MIM DEVICES; MIS DEVICES; PERMITTIVITY; PULSED LASER APPLICATIONS; SEMICONDUCTOR DEVICE STRUCTURES; THERMODYNAMIC STABILITY;

DIAMOND LIKE CARBON FILMS; HEXAGONAL BORON NITRIDE FILMS;

DIELECTRIC FILMS;

EID: 0029192557     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-381-273     Document Type: Conference Paper

References (19)