Approach to run-to-run control for rapid thermal processing

Proceedings of the American Control Conference

Volumn 2, Issue , 1995, Pages 1286-1288

  Zafiriou, Evanghelos ^a   Adomaitis, Raymond A ^a   Gattu, Gangadhar ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CHEMICAL REACTORS; COMPUTER SIMULATION; ERRORS; FEEDBACK CONTROL; ITERATIVE METHODS; MATHEMATICAL MODELS; OPTIMAL CONTROL SYSTEMS; OPTIMIZATION; SEMICONDUCTOR DEVICE MANUFACTURE;

FEASIBLE SEQUENTIAL QUADRATIC PROGRAMMING; OVERHEATING; RAPID THERMAL PROCESSING; RUN-TO-RUN CONTROL;

PROCESS CONTROL;

EID: 0029192292     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)