Fabrication of monolithic microchannels for IC chip cooling

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 362-367

  Joo, Youngcheol ^a   Dieu, Kiet ^a   Kim, Chang Jin ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COOLING; ELECTROPLATING; ETCHING; MASKS; METALLOGRAPHIC MICROSTRUCTURE; MICROELECTROMECHANICAL DEVICES; MONOLITHIC INTEGRATED CIRCUITS; PHOTORESISTS; ULTRAVIOLET RADIATION; X RAY LITHOGRAPHY;

MICROELECTRONICS CHIPS COOLING; MICROELECTROPLATING; MONOLITHIC MICROCHANNELS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0029191566     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)