MEMS for pressure distribution studies of gaseous flows in microchannels

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 209-215

  Liu, Jianqiang ^a   Tai, Yu Chong ^a   Ho, Chih Ming ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CHANNEL FLOW; FLOW OF FLUIDS; GEOMETRY; MATHEMATICAL MODELS; NAVIER STOKES EQUATIONS; PRESSURE; SENSORS;

GASEOUS PRESSURE DISTRIBUTIONS; MICRON SIZED CHANNELS; SLIP FLOW MODEL; VENTURI METER LIKE TRANSITIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0029180120     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)