Ultrasonic motor using bending cylindrical transducer based on PZT thin film

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 49-54

  Morita, Takeshi ^a   Kurosawa, Minoru ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CYLINDERS (SHAPES); ELECTRODES; LEAD COMPOUNDS; ROTORS; STATORS; THIN FILMS; TORQUE; ULTRASONIC EQUIPMENT; ULTRASONIC TRANSDUCERS; VIBRATIONS (MECHANICAL);

BENDING CYLINDRICAL TRANSDUCERS; HYDROTHERMAL METHOD; LEAD ZIRCONATE TITANATE; MINIATURIZATION; RF DRIVING ELECTRICAL SOURCES; TITANIUM PIPE; ULTRASONIC MOTORS;

MOTORS;

EID: 0029179040     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)