SCOPUS 정보 검색 플랫폼

Applied Surface Science

Volumn 82-83, Issue C, 1994, Pages 468-474

NbCl5 as a precursor in atomic layer epitaxy

(4) Elers, Kai Erik a Ritala, Mikko a Leskelä, Markku a Rauhala, Eero a

a UNIVERSITY OF HELSINKI (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIUM COMPOUNDS; CHLORINE COMPOUNDS; DOPING (ADDITIVES); FILM GROWTH; NIOBIUM COMPOUNDS; NITRIDES; POLYCRYSTALLINE MATERIALS; STOICHIOMETRY; THERMODYNAMIC STABILITY; THIN FILMS; TIN COMPOUNDS; TITANIUM DIOXIDE;

ATOMIC LAYER EPITAXY; NIOBIUM CHLORIDE; NIOBIUM NITRIDE; TIN DIOXIDE;

EPITAXIAL GROWTH;

EID: 0028762116 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/0169-4332(94)90260-7 Document Type: Article

Times cited : (58)

References (27)

1
- 0016034296
- (1974) J. Appl. Phys. , vol.45 , pp. 1389
- Oya¹ Onodera²

2
- 0038591762
- (1987) Appl. Phys. Lett. , vol.50 , pp. 1607
- Kirtley¹ Raider² Feenstra³ Fein⁴

3
- 0023416412
- (1987) Thin Solid Films , vol.152 , pp. 535
- Deen¹

4
- 3643086821
- (1993) J. Appl. Phys. , vol.73 , pp. 1151
- Ishiguro¹ Matsushima² Hamasaki³

5
- 21144470518
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 615
- Maung¹ Butler² Huang³

6
- 0020814892
- (1983) Thin Solid Films , vol.107 , pp. 207
- Singer¹ Bolster² Wolf³ Skelton⁴ Jeffries⁵

7
- 84862294107
- Deposition and properties of polycrystalline TiN/NbN superlattice coatings
- (1992) Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films , vol.10 , pp. 1604
- Chu¹ Wong² Sproul³ Rohde⁴ Barnett⁵

8
- 71849095596
- Reactive magnetron sputter deposition of niobium nitride films
- (1993) Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films , vol.11 , pp. 1528
- Wong¹ Sproul² Chu³ Barnett⁴

9
- 0003490177
- Semicond. Int.
- (1992) Semicond. Int. , pp. 32
- Singer¹

10
- 0027002440
- (1992) J. Electrochem. Soc. , vol.139 , pp. 3690
- Azad¹ Akbar² Mhaisalkar³ Birkefeld⁴ Goto⁵

11
- 0002468625
- (1992) Am. Ceram. Soc. Bull. , vol.71 , pp. 85
- Sheppard¹

12
- 0023642138
- (1987) Thin Solid Films , vol.147 , pp. 167
- Kurtz¹ Gordon²

13
- 0027206855
- Electrical properties of Cr- and Nb-doped TiO2 thin films
- (1993) Applied Surface Science , vol.65-66 , pp. 240
- Bernasik¹ Radecka² Rekas³ Sloma⁴

14
- 0024131192
- (1988) Thin Solid Films , vol.166 , pp. 149
- Hiltunen¹ Leskelä² Mäkelä³ Niinistö⁴ Nykänen⁵ Soininen⁶

15
- 0004266127
- T. Suntola, M. Simpson, Blackie and Son, Glasgow
- (1990) Atomic Layer Epitaxy , pp. 1
- Leskelä¹ Niinistö²

16
- 0000309374
- (1993) Thin Solid Films , vol.225 , pp. 288
- Ritala¹ Leskalä² Nykänen³ Soininen⁴ Niinistö⁵

17
- 0028758883
- (1994) Appl. Surf. Sci. , vol.75 , pp. 333
- Ritala¹ Leskelä²

18
- 0002572435
- (1992) Thin Solid Films , vol.216 , pp. 84
- Suntola¹

19
- 0024647155
- Proton backscattering and computer data analysis in the non-rutherford energy region
- (1989) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms , vol.40-41 , pp. 790
- Rauhala¹

20
- 4243261604
- Ranges of ^{15}N^{+} ions in ten metals measured by (p, αγ) resonance broadening
- (1978) Physical Review B , vol.18 , pp. 4657
- Luomajärvi¹ Keinonen² Bister³ Anttila⁴

21
- 0345944096
- (1987) Appl. Phys. Lett. , vol.51 , pp. 973
- Rauhala¹ Keinonen² Rakennus³ Pessa⁴

22
- 0013488042
- Preparation of Single-Crystalline NbN and Nb4N5Films
- (1971) Japanese Journal of Applied Physics , vol.10 , pp. 1485
- Oya¹ Onodera²

23
- 84913002968
- E. Nykänen, M. Mäkelä, P. Soininen, M. Leskelä and L. Niinistö, to be published.

24
- 0042386181
- Outokumpu Research Oy, Pori, Finland
- (1993) Outokumpu HSC Chemistry for Windows program package, Version 1.10

25
- 0015020207
- (1971) J. Less Common Met. , vol.23 , pp. 159
- Terao¹

26
- 84913010987
- Joint Committee on Powder Diffraction Standards, Cards 20–801, 20–803 and 38–1155.

27
- 0027659199
- (1993) Thin Solid Films , vol.232 , pp. 56
- Ylilammi¹ Ranta-aho²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.