High-temperature-resistant gratings for moire interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2342, Issue , 1994, Pages 238-243

  Forno, Colin ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIFFRACTION GRATINGS; HIGH TEMPERATURE EFFECTS; MOIRE FRINGES; PHOTORESISTS; RESIDUAL STRESSES;

METALLIZED PHOTORESISTS; MOIRE INTERFEROMETRY;

INTERFEROMETRY;

EID: 0028758251     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)