High performance CBiCMOS with novel self-aligned vertical PNP transistors

IEEE Bipolar/BiCMOS Circuits and Technology Meeting

Volumn , Issue , 1994, Pages 238-241

  Ikeda, Tatsuhiko ^a   Nakashima, Takashi ^a   Kubo, Shunji ^a   Jouba, Hiroyuk ^a   Yamawaki, Masao ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRODES; FREQUENCIES; MASKS; MOSFET DEVICES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING;

BASE; COMPLEMENTARY BICMOS; CUT OFF FREQUENCY; EMITTER; NPN TRANSISTORS; PHOTOMASK; PNP TRANSISTORS;

BIPOLAR TRANSISTORS;

EID: 0028757703     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)