A Practical Excimer Laser-Based Cleaning Tool For Removal Of Surface Contaminants

IEEE Transactions on Components Packaging and Manufacturing Technology Part A

Volumn 17, Issue 4, 1994, Pages 631-643

  Tarn, Andrew C ^c   Grigoropoulos, Costas P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b IBM   (United States)

^c IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

explosive vaporization; industrial laser application; Laser cleaning; laser induced particle removal; microcontamination; microdevice manufacturing

Indexed keywords

EXCIMER LASERS; IMPURITIES; IRRADIATION; LASER BEAM EFFECTS; MICROELECTRONICS; ULTRAVIOLET RADIATION; VAPORIZATION;

EXCIMER LASER BASED CLEANING TOOL; EXPLOSIVE VAPORIZATION; LASER INDUCED PARTICLE REMOVAL; MICRODEVICE MANUFACTURE; SURFACE CONTAMINANT REMOVAL;

CLEANING;

EID: 0028757082     PISSN: 10709886     EISSN: None     Source Type: Journal    
DOI: 10.1109/95.335050     Document Type: Article

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56. The use of trade names or manufacturers in this paper does not constitute an endorsement of their products or equipment.