Simulation of advanced field isolation using calibrated viscoelastic stress analysis

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1994, Pages 881-884

  Senez, Vincent ^a   Collard, Dominique ^a   Ferreira, Paul ^a   Baccus, Bruno ^a  

^a Institut Superieur de l'Electronique et du Numerique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; MATHEMATICAL MODELS; STRESS ANALYSIS; STRESSES; SUBSTRATES; THERMOOXIDATION; VISCOELASTICITY;

ADVANCED FIELD ISOLATION; OXIDATION INDUCED STRESSES;

SEMICONDUCTING SILICON;

EID: 0028753792     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)