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Volumn , Issue , 1994, Pages 865-868
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Two-dimensional transient enhanced diffusion and its impact on bipolar transistors
a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CMOS INTEGRATED CIRCUITS;
DIFFUSION IN SOLIDS;
ION IMPLANTATION;
MOSFET DEVICES;
OXIDATION;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DOPING;
OXIDATION ENHANCED DIFFUSION;
TRANSIENT ENHANCED DIFFUSION;
BIPOLAR TRANSISTORS;
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EID: 0028750683
PISSN: 01631918
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (11)
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References (7)
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