Strategies for systematic synthesis of compliant mems

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 55-2, Issue , 1994, Pages 677-686

  Ananthasuresh, G K ^a   Kota, Sridhar ^a   Kikuchi, Noboru ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; DEFORMATION; ELASTICITY; FABRICATION; FRICTION; LOADS (FORCES); MACHINE DESIGN; OPTIMIZATION; TOPOLOGY;

COMPLIANT MICROMECHANISM SYNTHESIS; CRIMPING MECHANISM; DISTRIBUTED COMPLIANCE; ELASTIC DEFORMATION; FLEXURAL PIVOTS; HOMOGENIZATION METHOD; MECHANICAL MOTIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0028749752     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)