Improved electrical characteristics of thin-film transistors fabricated on nitrogen-implanted polysilicon films

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1994, Pages 505-508

  Yang, Chien Kuo ^a   Lei, Tan Fu ^a   Lee, Chung Len ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC PROPERTIES; FABRICATION; GATES (TRANSISTOR); ION IMPLANTATION; MOSFET DEVICES; NITROGEN; PASSIVATION; PLASMA APPLICATIONS; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON;

NITROGEN IMPLANTED POLYSILICON FILMS;

THIN FILM TRANSISTORS;

EID: 0028749410     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)