Correlation study between different types of CDM testers and 'real' manufacturing in-line leakage failures

Electrical Overstress/Electrostatic Discharge Symposium Proceedings

Volumn , Issue , 1994, Pages 63-68

  Chaine, Michael ^a   Liong, Chen Teck ^a   San, Ho Fock ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY; BUFFER CIRCUITS; CMOS INTEGRATED CIRCUITS; ELECTRIC DISCHARGES; ELECTRON DEVICE MANUFACTURE; LEAKAGE CURRENTS; RESISTORS; SCANNING ELECTRON MICROSCOPY; SCHEMATIC DIAGRAMS; TRANSISTORS; TRIBOELECTRICITY; WAVEFORM ANALYSIS;

CALIBRATION WAVEFORMS; CHARGED DEVICE MODEL; ELECTROSTATIC DISCHARGE; GATE OXIDE DAMAGE; TRIBOELECTRIC CHARGING;

ELECTRON DEVICE TESTING;

EID: 0028748520     PISSN: 07395159     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)