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Volumn , Issue , 1994, Pages 75-78
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0.1-μm CMOS technology with tilt-implanted punchthrough stopper (TIPS)
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITANCE;
DEGRADATION;
FIELD EFFECT TRANSISTORS;
HOT CARRIERS;
OPTIMIZATION;
SEMICONDUCTOR DOPING;
SEMICONDUCTOR JUNCTIONS;
SUBSTRATES;
ULSI CIRCUITS;
HOT CARRIER INDUCED DEGRADATION;
LARGE ANGLE TILT (LAT);
TILT IMPLANTED PUNCHTHROUGH STOPPER (TIPS);
CMOS INTEGRATED CIRCUITS;
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EID: 0028746293
PISSN: 01631918
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (66)
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References (7)
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