Silicon Microstructures and Microactuators for Compact Computer Disk Drives

IEEE Control Systems

Volumn 14, Issue 6, 1994, Pages 52-57

  Miu, Denny K ^a   Tai, Yu Chong ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DIGITAL STORAGE; ELECTROMECHANICAL DEVICES; MICROMACHINING; ROTATING DISKS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; STORAGE ALLOCATION (COMPUTER); TECHNOLOGY;

ELECTROMAGNETIC MICROACTUATORS; MICROSUSPENSIONS; MINIATURIZATION; SILICON MICROMACHINING;

MAGNETIC DISK STORAGE;

EID: 0028744210     PISSN: 1066033X     EISSN: None     Source Type: Journal    
DOI: 10.1109/37.334415     Document Type: Article

References (5)

1. D.K. Miuand Y-C. Tai, “Silicon Micromachined SCALED Technology” Proc. of the 1993 JSME International Conferecnce on Advanced Mechatron- Tokyo, Japan, August 2–4, 1993, pp. 527-532.
2. D.K.Miu S. Tatic-Lucic, and Y.-C. Tai “Silicon Micromachined Microcomputers for Super-Compact Magnetic Recordin Rigid Disk Drives. Proc. of the 7th International Conference on Sensors and Actuators, Yokohama, Japan, June 7–10, 1993, pp. 771–773.
3. D.K. Miu, S. Wu, V. Temesvary, and Y.-C. Tai, “Silicon Microgimbals for Super-Compact Magnetic Recording Rigid Disk Drives,” ASME Advances in Information Storage Systems, vol. 5, pp. 149–152, 1993.
4. V. Temesvary, S. Wu W. Hsieh Y.-C. Tai, and D.K., Miu, “Design, ‘ Fabrication and Testing of Silicon Microgimbals for Super-Compact Rigid Disk Drives,” being reviewed for publication in the IEEE/ASME Journal of MEMS, 1994.
5. S. Wu Y.-C. Tai D.K. Miu, V. Temesvary, and W. Hsieh, “Silicon Micromachined Integrated Suspension Systems for 30% Read/Write Pico- Sliders,” in preparation, to be submitted to the ASME Journal of Vibration and Acoustics.