Characteristics of CMOS device isolation for the ULSI age

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1994, Pages 671-674

  Bryant, Andres ^a   Hansch, Wilfried ^a   Mii, Toshio ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CARRIER CONCENTRATION; ELECTRIC VARIABLES CONTROL; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; LEAKAGE CURRENTS; MOSFET DEVICES; PROCESS CONTROL; RANDOM ACCESS STORAGE; ULSI CIRCUITS;

ISOLATION PLANARITY;

CMOS INTEGRATED CIRCUITS;

EID: 0028744093     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)