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Volumn 197, Issue , 1994, Pages 51-56
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Non-linear pressure distribution in uniform microchannels
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Author keywords
[No Author keywords available]
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Indexed keywords
HELIUM;
MICROMACHINING;
NITROGEN;
PRESSURE EFFECTS;
PRESSURE TRANSDUCERS;
SENSORS;
KNUDSEN NUMBER;
NONLINEAR PRESSURE DISTRIBUTION;
SURFACE MICROMACHINED MICROFLOW SYSTEM;
UNIFORM MICROCHANNELS;
FLOW OF FLUIDS;
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EID: 0028742772
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (303)
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References (10)
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