Structural and electrical characterization of highly tetrahedral-coordinated diamond-like carbon films grown by pulsed-laser deposition

Materials Research Society Symposium - Proceedings

Volumn 349, Issue , 1994, Pages 507-512

  Siegal, M P ^a   Friedmann, T A ^a   Kurtz, S R ^a   Tallant, D R ^a   Simpson, R L ^a   Dominguez, F ^a   McCarty, K F ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; CHEMICAL BONDS; FILM GROWTH; PERMITTIVITY; PERMITTIVITY MEASUREMENT; PULSED LASER APPLICATIONS; SCHOTTKY BARRIER DIODES; SEMICONDUCTING FILMS; SILICON; SUBSTRATES; SURFACE PROPERTIES;

HIGHLY TETRAHEDRAL COORDINATED AMORPHOUS CARBON FILMS; PULSED LASER DEPOSITION;

AMORPHOUS FILMS;

EID: 0028742710     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-349-507     Document Type: Conference Paper

References (16)