Cost of ownership for x-ray proximity lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2194, Issue , 1994, Pages 22-33

  Early, Kathy ^a   Arnold, William H ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COSTS; PHOTOLITHOGRAPHY; PRINTING MACHINERY; SEMICONDUCTOR DEVICE MANUFACTURE; SYNCHROTRONS; X RAY APPARATUS;

COST OF OWNERSHIP; CRITICAL LEVEL PATTERNING; DEEP ULTRAVIOLET LITHOGRAPHY; HIGH VOLUME MANUFACTURING; X RAY COSTS; X RAY PROXIMITY PRINTING SYSTEMS;

X RAY LITHOGRAPHY;

EID: 0028742281     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.175796     Document Type: Conference Paper

References (26)