Acoustic-wave based monolithic microsensors

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1994, Pages 565-574

  Vellekoop, M J ^a   Lubking, G W ^a   Venema, A ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC DEVICES; ACOUSTIC WAVES; BIPOLAR INTEGRATED CIRCUITS; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; MONOLITHIC INTEGRATED CIRCUITS; OSCILLATORS (ELECTRONIC); PIEZOELECTRIC MATERIALS; SEMICONDUCTING SILICON; THIN FILMS;

ACOUSTIC OSCILLATORS; LAMB WAVE OSCILLATORS; MICROSENSORS;

SENSORS;

EID: 0028739472     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ultsym.1994.401652     Document Type: Conference Paper

References (19)