Defect geometries and laser-induced damage in multilayer coatings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2262, Issue , 1994, Pages 60-66

  Tench, Robert J ^a   Kozlowski, Mark R ^a   Chow, Robert ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; FOCUSING; HAFNIUM COMPOUNDS; ION BEAMS; LASER APPLICATIONS; MIRRORS; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; SILICON DIOXIDE;

ATOMIC FORCE MICROSCOPY; LASER INDUCED DAMAGE;

OPTICAL COATINGS;

EID: 0028736234     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)