Double-polysilicon self-aligned npn bipolar process (ADRF) with optional NMOS transistors for RF and microwave applications

IEEE Bipolar/BiCMOS Circuits and Technology Meeting

Volumn , Issue , 1994, Pages 221-224

  O, Kenneth ^a   Garone, Peter ^a   Tsai, Curtis ^a   Scharf, Brad ^a   Higgins, Mary ^a   Mai, Dominic ^a   Kermarrec, Christian ^a   Yasaitis, John ^a  

^a ANALOG DEVICES INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC CONTACTS; ELECTRIC INSULATORS; ELECTRIC LINES; GATES (TRANSISTOR); ION IMPLANTATION; MOSFET DEVICES; OXIDES; RESISTORS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING;

DOUBLE POLYSILICON SELF ALIGNED BIPOLAR TRANSISTORS; POLYSILICON GATE; SILICON BIPOLAR PROCESS;

BIPOLAR TRANSISTORS;

EID: 0028735347     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)