Elastic modulus of diamond-like carbon films prepared by pulsed vacuum arc

Thin Solid Films

Volumn 253, Issue 1-2, 1994, Pages 125-129

  Schultrich, B ^a   Scheibe, H J ^a   Grandremy, G ^a   Schneider, D ^a   Siemroth, P ^a  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

Amorphous materials; Carbon; Elastic properties; Plasma processing and deposition

Indexed keywords

CARBON; DEPOSITION; ELASTIC MODULI; ELASTICITY; ELECTRIC CURRENTS; ESTIMATION; HARDNESS; PLASMA APPLICATIONS; PROCESSING; TECHNOLOGY; THIN FILMS; ULTRASONIC PROPAGATION;

DIAMOND LIKE CARBON FILMS; PULSED VACUUM ARC DEPOSITION METHOD; TECHNOLOGICAL PARAMETERS; ULTRASONIC SURFACE WAVE PROPAGATION; YOUNGS MODULUS;

AMORPHOUS FILMS;

EID: 0028734270     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(94)90306-9     Document Type: Article

References (15)

1. Ion Beam and Ion-Assisted Deposition of Diamond-Like Carbon Films
2. 3) Film Growth from Mass Selected Ion Beams: Parametric Investigations and Subplantation Model