ARXPS studies of SiC2-SiC interfaces and oxidation of 6H SiC single crystal Si-(001) and C-(001) surfaces

Journal of Materials Research

Volumn 9, Issue 12, 1994, Pages 3088-3094

  Hometz, B ^a   Michel, H J ^b   Halbritter, J ^b  

^a UNIVERSITY OF KARLSRUHE   (Germany)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CRYSTAL STRUCTURE; INTERFACES (MATERIALS); OXIDATION; SILICA; SINGLE CRYSTALS; SURFACES; X RAY PHOTOELECTRON SPECTROSCOPY;

INTERFACE COMPOUND;

SILICON CARBIDE;

EID: 0028731053     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/JMR.1994.3088     Document Type: Article

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